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Fundamentals of semiconductor manufacturing and process control
by May, Gary S. and Spanos, Costas J.Published by: Hoboken, New Jersey : John Wiley & Sons, Inc. , 2006
- Sublocation
- EGC
- Call Number
- 621.3815 M4514f 2006
- Physical Desc.
- xix, 463 p.
- Note
- Includes bibliographic references and index.
- ISBN
- 978-0-471-78406-7
- Copies
- —